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Chemical Vapor Deposition of Alumina Thin Films Utilizing Novel Precursor Methodology

Bradley D Fahlman

Chemistry & Biochemistry
Science of Advanced Materials

Research output: Other contribution

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Original language	English
State	Published - Aug 22 1999

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Fahlman, B. D. (1999, Aug 22). Chemical Vapor Deposition of Alumina Thin Films Utilizing Novel Precursor Methodology.

Fahlman, Bradley D. / Chemical Vapor Deposition of Alumina Thin Films Utilizing Novel Precursor Methodology. 1999.

@misc{f967ecf420954c299334c703c6cb3b7f,

title = "Chemical Vapor Deposition of Alumina Thin Films Utilizing Novel Precursor Methodology",

author = "Fahlman, {Bradley D}",

year = "1999",

month = aug,

day = "22",

language = "English",

type = "Other",

}

Fahlman, BD 1999, Chemical Vapor Deposition of Alumina Thin Films Utilizing Novel Precursor Methodology..

Chemical Vapor Deposition of Alumina Thin Films Utilizing Novel Precursor Methodology. / Fahlman, Bradley D.

1999.

Research output: Other contribution

TY - GEN

T1 - Chemical Vapor Deposition of Alumina Thin Films Utilizing Novel Precursor Methodology

AU - Fahlman, Bradley D

PY - 1999/8/22

Y1 - 1999/8/22

M3 - Other contribution

ER -

Fahlman BD. Chemical Vapor Deposition of Alumina Thin Films Utilizing Novel Precursor Methodology. 1999.

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