Chemical Vapor Deposition of Conformal Alumina Thin Films

A. R. Barron, Bradley D Fahlman

Research output: Contribution to journalArticlepeer-review

Abstract

Chemical Processing of Dielectrics, Insulators and Electronic Ceramics
Original languageEnglish
Pages (from-to)606
JournalMater. Res. Soc. Symp. Proc.
Issue number75
StatePublished - 2000

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