CMOS compatible synthesis of carbon nanotubes

Takashi Uchino, Konstantinos N. Bourdakos, Gregory N. Ayre, Cornelis H.De Groot, Peter Ashburn, David C. Smith

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations


A technique to synthesize high-quality single walled carbon nanotubes (SWNTs) using chemical vapour deposition (CVD) on Ge Stranski-Krastanow dots has been developed. From transmission electron microscopy and Raman measurements, the grown carbon nanotubes (CNTs) are identified as SWNTs with diameters ranging from 1.6 to 2.1 nm. Extensive scanning electron microscopy and atomic force characterisation of the effect of each stage in the growth process is presented. Our hypothesis is that pre-treatment stages lead to the formation of Ge nanoparticles, which act as seeds for CNT growth. This technique demonstrates the ability to synthesize high-quality SWNTs without the need for a metal catalyst, using processes and equipment standard to a silicon foundry.

Original languageEnglish
Title of host publicationCarbon Nanotubes and Related Low-Dimensional Materials
PublisherMaterials Research Society
Number of pages6
ISBN (Print)9781605608679
StatePublished - 2008
Externally publishedYes
Event2008 MRS Spring Meeting - San Francisco, CA, United States
Duration: Mar 24 2008Mar 28 2008

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Conference2008 MRS Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, CA


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