TY - GEN
T1 - CMOS compatible synthesis of carbon nanotubes
AU - Uchino, Takashi
AU - Bourdakos, Konstantinos N.
AU - Ayre, Gregory N.
AU - Groot, Cornelis H.De
AU - Ashburn, Peter
AU - Smith, David C.
PY - 2008
Y1 - 2008
N2 - A technique to synthesize high-quality single walled carbon nanotubes (SWNTs) using chemical vapour deposition (CVD) on Ge Stranski-Krastanow dots has been developed. From transmission electron microscopy and Raman measurements, the grown carbon nanotubes (CNTs) are identified as SWNTs with diameters ranging from 1.6 to 2.1 nm. Extensive scanning electron microscopy and atomic force characterisation of the effect of each stage in the growth process is presented. Our hypothesis is that pre-treatment stages lead to the formation of Ge nanoparticles, which act as seeds for CNT growth. This technique demonstrates the ability to synthesize high-quality SWNTs without the need for a metal catalyst, using processes and equipment standard to a silicon foundry.
AB - A technique to synthesize high-quality single walled carbon nanotubes (SWNTs) using chemical vapour deposition (CVD) on Ge Stranski-Krastanow dots has been developed. From transmission electron microscopy and Raman measurements, the grown carbon nanotubes (CNTs) are identified as SWNTs with diameters ranging from 1.6 to 2.1 nm. Extensive scanning electron microscopy and atomic force characterisation of the effect of each stage in the growth process is presented. Our hypothesis is that pre-treatment stages lead to the formation of Ge nanoparticles, which act as seeds for CNT growth. This technique demonstrates the ability to synthesize high-quality SWNTs without the need for a metal catalyst, using processes and equipment standard to a silicon foundry.
UR - http://www.scopus.com/inward/record.url?scp=70350610611&partnerID=8YFLogxK
U2 - 10.1557/proc-1081-p01-09
DO - 10.1557/proc-1081-p01-09
M3 - Conference contribution
AN - SCOPUS:70350610611
SN - 9781605608679
T3 - Materials Research Society Symposium Proceedings
SP - 27
EP - 32
BT - Carbon Nanotubes and Related Low-Dimensional Materials
PB - Materials Research Society
Y2 - 24 March 2008 through 28 March 2008
ER -