CVD of Conformal Alumina Thin Films via Hydrolysis of AlH3(NMe2Et)

Research output: Contribution to journal › Article › peer-review

Cite this

@article{e24168d9547d4e15a030ca6e3dbdd57a,

title = "CVD of Conformal Alumina Thin Films via Hydrolysis of AlH3(NMe2Et)",

author = "Barron, {A. R.} and Fahlman, {Bradley D}",

year = "2000",

language = "English",

volume = "3-5",

pages = "135",

journal = "Adv. Mater. Opt. Electron",

publisher = "Adv. Mater. Opt. Electron",

number = "10",

}