CVD of Conformal Alumina Thin Films via Hydrolysis of AlH3(NMe2Et)

A. R. Barron, Bradley D Fahlman

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)135
JournalAdv. Mater. Opt. Electron
Volume3-5
Issue number10
StatePublished - 2000

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