Original language | English |
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Pages (from-to) | 135 |
Journal | Adv. Mater. Opt. Electron |
Volume | 3-5 |
Issue number | 10 |
State | Published - 2000 |
CVD of Conformal Alumina Thin Films via Hydrolysis of AlH3(NMe2Et)
A. R. Barron, Bradley D Fahlman
Research output: Contribution to journal › Article › peer-review