Cycle time approximations for the G/G/m queue subject to server failures and cycle time offsets with applications

James R. Morrison, Donald P. Martin

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

10 Scopus citations

Abstract

Approximate queueing formulae are often employed for the practical evaluation of manufacturing system performance. Common approximations do not fully address practical issues such as idle tools with work in queue, travel time between stages of production, removal of lots from queue pending process issue resolution and the tendency of lots to defect from a failed server in favor of an equivalent available server. In this paper, approximate queueing formulae are proposed which extend popular existing formulae. To test the quality of the proposed approximations, data from production toolsets in IBM's 200mm semiconductor manufacturing fabricator is considered. It is demonstrated that the approximations perform well on the toolsets studied.

Original languageEnglish
Title of host publication17th Annual SEMI/IEEE Advanced Semiconductor Manufacturing Conference, ASMC 2006
Pages322-326
Number of pages5
DOIs
StatePublished - 2006
Event17th Annual SEMI/IEEE Advanced Semiconductor Manufacturing Conference, ASMC 2006 - Boston, MA, United States
Duration: May 22 2006May 24 2006

Publication series

NameASMC (Advanced Semiconductor Manufacturing Conference) Proceedings
Volume2006
ISSN (Print)1078-8743

Conference

Conference17th Annual SEMI/IEEE Advanced Semiconductor Manufacturing Conference, ASMC 2006
Country/TerritoryUnited States
CityBoston, MA
Period05/22/0605/24/06

Keywords

  • Approximate performance evaluation
  • Cycle time
  • Cycle time offsets
  • G/G/m queue
  • Hold time
  • Server failures

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