TY - GEN
T1 - Electrically tunable airborne particle classifier using a virtual impactor
AU - Kim, Y. H.
AU - Park, D.
AU - Hwang, J.
AU - Kim, Y. J.
PY - 2008
Y1 - 2008
N2 - This paper reports an airborne particle classifier based on a virtual impactor (VI) which is capable of actively tuning a cut-off diameter by applying the electric potential. The VI aerodynamically classifies airborne particles according to their size. An electrode pair is integrated in the VI, which make possible to electrically control the cut-off diameter of the VI without additional fabrications. The VI with a cut-off diameter of 1 μm was designed, and its cut-off characteristics were examined. Thereafter, the cut-off diameter was successfully tuned to from 35 nm to 70 nm by applying electric potentials from 1 kV to 3 kV.
AB - This paper reports an airborne particle classifier based on a virtual impactor (VI) which is capable of actively tuning a cut-off diameter by applying the electric potential. The VI aerodynamically classifies airborne particles according to their size. An electrode pair is integrated in the VI, which make possible to electrically control the cut-off diameter of the VI without additional fabrications. The VI with a cut-off diameter of 1 μm was designed, and its cut-off characteristics were examined. Thereafter, the cut-off diameter was successfully tuned to from 35 nm to 70 nm by applying electric potentials from 1 kV to 3 kV.
UR - http://www.scopus.com/inward/record.url?scp=50149098816&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2008.4443714
DO - 10.1109/MEMSYS.2008.4443714
M3 - Conference contribution
AN - SCOPUS:50149098816
SN - 9781424417933
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 547
EP - 550
BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Y2 - 13 January 2008 through 17 January 2008
ER -