Growth of carbon nanotubes on HfO2 towards highly sensitive nano-sensors

Takashi Uchino, Greg N. Ayre, David C. Smith, John L. Hutchison, C. H. De Groot, Peter Ashburn

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Carbon nanotube (CNT) growth on HfO2 is reported for the first time. The process uses a combination of Ge and Fe nanoparticles and achieves an increase in CNT density from 0.15 to 6.2 μm length/μm2 compared with Fe nanoparticles alone. The synthesized CNTs are assessed by the fabrication of back-gate CNT field-effect transistors with Al source/drain contacts for nano-sensor applications. The devices exhibit excellentp-type behavior with an /on//off ratio of 105 and a steep sub-threshold slope of 130 mV/dec.

Original languageEnglish
Article number04DN11
JournalJapanese Journal of Applied Physics
Volume49
Issue number4 PART 2
DOIs
StatePublished - Apr 2010
Externally publishedYes

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