Guest editorial: Equipment and operations automation in the semiconductor industry

James R. Morrison; Chen Fu Chien; Stéphane Dauzère-Pérès; Milind Dawande; Han Ding; Jeffrey S. Pettinato; Jingang Yi

doi:10.1109/TASE.2010.2078870

Guest editorial: Equipment and operations automation in the semiconductor industry

James R. Morrison, Chen Fu Chien, Stéphane Dauzère-Pérès, Milind Dawande, Han Ding, Jeffrey S. Pettinato, Jingang Yi

Engineering & Technology, School Of

Research output: Contribution to journal › Editorial

2 Scopus citations

Original language	English
Article number	5618590
Pages (from-to)	1-4
Number of pages	4
Journal	IEEE Transactions on Automation Science and Engineering
Volume	8
Issue number	1
DOIs	https://doi.org/10.1109/TASE.2010.2078870
State	Published - Jan 2011

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Guest editorial: Equipment and operations automation in the semiconductor industry

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