Hafnium complexes with versatile β-diketiminate ligands: Synthesis, spectroscopic investigation and volatility study

Siddappa A. Patil, Phillip A. Medina, Aleks Antic, Joseph W. Ziller, Jason K. Vohs, Bradley D. Fahlman

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Synthesis and spectral investigation of four novel β-diketiminate hafnium(IV) chloride complexes cis-dichloro-bis(2,4-bis(phenylimino)pent-3-ene)-hafnium (4a), cis-dichloro-bis(2,4-bis(4-methylphenylimino)pent-3-ene)-hafnium (4b), cis-dichloro-bis(2,4-bis(4-methoxyphenylimino)pent-3-ene)-hafnium (4c) and cis-dichloro-bis(2,4-bis(4-chlorophenylimino)pent-3-ene)-hafnium (4d) are reported. All complexes (4a-d) were characterized by spectroscopic methods (1H NMR, 13C NMR and mass) and elemental analysis. The solid-state structure of compound 4a was further examined by single crystal X-ray diffraction. The X-ray structure of 4a reveals that the complex is monomeric with the hafnium center in a distorted octahedral geometry, and the chloride ligands are in a cis arrangement. The thermal stability and volatility of the compounds were probed by TGA/DSC tests demonstrating the potential utility of compounds (4a-d) as precursors for CVD/ALD thin film growth below 200 °C.

Original languageEnglish
Pages (from-to)71-79
Number of pages9
JournalInorganica Chimica Acta
Volume426
DOIs
StatePublished - Feb 24 2015

Keywords

  • Hafnium compounds
  • MOCVD
  • Sublimation enthalpy
  • Volatility
  • β-Diketiminate

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