Mean cycle time optimization in semiconductor tool sets via pm planning with different cycles: A G/G/m queueing and nonlinear programming approach

James R. Morrison, Hungil Kim, Adar A. Kalir

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

In semiconductor manufacturing, preventive maintenance (PM) activities are typically scheduled via a two tier hierarchical decomposition approach. The first decision tier determines a PM cycle plan while the second tier schedules these planned events into the manufacturing operations. Following recent work based on the use of G/G/m queueing approximations for PM planning, we develop a method to allow for multiple PM cycles in a tool set. We formulate a nonlinear program with the PM cycle durations as continuous decision variables with the objective of minimizing the mean cycle time. We examine certain special cases and characterize the optimal solutions. Numerical studies are conducted with realistic multiple PM cycle data to assess the implications of the proposed approach. The results suggest that it may be possible to obtain significant improvements in the overall cycle time performance of tool sets in semiconductor manufacturing relative to existing PM planning procedures.

Original languageEnglish
Title of host publicationProceedings of the 2014 Winter Simulation Conference, WSC 2014
EditorsAndreas Tolk, Levent Yilmaz, Saikou Y. Diallo, Ilya O. Ryzhov
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2466-2477
Number of pages12
ISBN (Electronic)9781479974863
DOIs
StatePublished - Jan 23 2015
Event2014 Winter Simulation Conference, WSC 2014 - Savannah, United States
Duration: Dec 7 2014Dec 10 2014

Publication series

NameProceedings - Winter Simulation Conference
Volume2015-January
ISSN (Print)0891-7736

Conference

Conference2014 Winter Simulation Conference, WSC 2014
Country/TerritoryUnited States
CitySavannah
Period12/7/1412/10/14

Fingerprint

Dive into the research topics of 'Mean cycle time optimization in semiconductor tool sets via pm planning with different cycles: A G/G/m queueing and nonlinear programming approach'. Together they form a unique fingerprint.

Cite this