New performance bounds for semiconductor manufacturing plants: batch tools and setups

James R. Morrison, P. R. Kumar

Research output: Contribution to journalConference articlepeer-review

Abstract

The state space approach to obtaining performance bounds via the average cost inequality allows for the incorporation of model elements such as batch tools and setup modes. We demonstrate with an example how one may construct linear programs to obtain performance bounds for queueing network models of semi-conductor manufacturing plants.

Original languageEnglish
Pages (from-to)1363-1367
Number of pages5
JournalProceedings of the IEEE Conference on Decision and Control
Volume2
StatePublished - 1999
EventThe 38th IEEE Conference on Decision and Control (CDC) - Phoenix, AZ, USA
Duration: Dec 7 1999Dec 10 1999

Fingerprint

Dive into the research topics of 'New performance bounds for semiconductor manufacturing plants: batch tools and setups'. Together they form a unique fingerprint.

Cite this