TY - GEN
T1 - On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events
AU - Lee, Minho
AU - Morrison, James R.
AU - Kalir, Adar A.
AU - Rozen, Kosta
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/1
Y1 - 2017/7/1
N2 - Preventive Maintenance activities (PMs) are essential for semiconductor manufacturing equipment. Since PMs are typically non-preemptive, they are usually modeled as high priority customers. We examine the accuracy of a popular approximation for the mean cycle time in G/G/1 queues with high priority PM customers. This approximation follows Kingman's and is based on a heavy traffic assumption. We observe that the approximations can perform very poorly when the mean and coefficient of variation of the PM durations are large and small, respectively. This is precisely the practical case for PMs in semiconductor manufacturing. We propose two practical correction candidates and assess their effectiveness. SPECIAL SESSION CODE = 4yd3b.
AB - Preventive Maintenance activities (PMs) are essential for semiconductor manufacturing equipment. Since PMs are typically non-preemptive, they are usually modeled as high priority customers. We examine the accuracy of a popular approximation for the mean cycle time in G/G/1 queues with high priority PM customers. This approximation follows Kingman's and is based on a heavy traffic assumption. We observe that the approximations can perform very poorly when the mean and coefficient of variation of the PM durations are large and small, respectively. This is precisely the practical case for PMs in semiconductor manufacturing. We propose two practical correction candidates and assess their effectiveness. SPECIAL SESSION CODE = 4yd3b.
UR - http://www.scopus.com/inward/record.url?scp=85044924993&partnerID=8YFLogxK
U2 - 10.1109/COASE.2017.8256191
DO - 10.1109/COASE.2017.8256191
M3 - Conference contribution
AN - SCOPUS:85044924993
T3 - IEEE International Conference on Automation Science and Engineering
SP - 737
EP - 738
BT - 2017 13th IEEE Conference on Automation Science and Engineering, CASE 2017
PB - IEEE Computer Society
T2 - 13th IEEE Conference on Automation Science and Engineering, CASE 2017
Y2 - 20 August 2017 through 23 August 2017
ER -