ON THE CONSEQUENCES OF UN-MODELED DYNAMICS TO THE OPTIMALITY OF SCHEDULES IN CLUSTERED PHOTOLITHOGRAPHY TOOLS

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Winter Simulation Conference Proceedings
Publisher	2019 WINTER SIMULATION CONFERENCE (WSC)
Pages	2224-2235
ISBN (Print)	0891-7736
State	Published - 2019

Cite this

@inproceedings{4432eb342c554d5e8a6d5d35f9c49941,

title = "ON THE CONSEQUENCES OF UN-MODELED DYNAMICS TO THE OPTIMALITY OF SCHEDULES IN CLUSTERED PHOTOLITHOGRAPHY TOOLS",

author = "Hyeong-Ook Kim and Morrison, {James Robert}",

year = "2019",

language = "English",

isbn = "0891-7736",

pages = "2224--2235",

booktitle = "Winter Simulation Conference Proceedings",

publisher = "2019 WINTER SIMULATION CONFERENCE (WSC)",

}