ON THE CONSEQUENCES OF UN-MODELED DYNAMICS TO THE OPTIMALITY OF SCHEDULES IN CLUSTERED PHOTOLITHOGRAPHY TOOLS

Hyeong-Ook Kim, James Robert Morrison

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationWinter Simulation Conference Proceedings
Publisher2019 WINTER SIMULATION CONFERENCE (WSC)
Pages2224-2235
ISBN (Print)0891-7736
StatePublished - 2019

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