On the consequences of unmodeled dynamics to the optimality of schedules in clustered photolithography tools

Hyeong-Ook Kim, James Robert Morrison

Research output: Contribution to conferenceAbstractpeer-review

Original languageEnglish
StatePublished - Dec 2019
Event15th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), Winter Simulation Conference - National Harbor, MD
Duration: Dec 1 2019Dec 31 2019

Other

Other15th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), Winter Simulation Conference
Period12/1/1912/31/19

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