On the throughput of deterministic flow lines with random state dependent setups: Stochastic models and applications

Woo Sung Kim, James R. Morrison

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Inspired by clustered photolithography tools in semiconductor wafer manufacturing, we study flow lines with deterministic process times subject to random state dependent setups. For tractability, we assume that the setup probability is constant and independent from customer to customer; the setup duration is constant. We show that the internal state of such a flow line can be modeled as a Markov chain when customers arrive in a just-in-time (JIT) fashion. We then develop expressions for the system throughput. We apply our models to clustered photolithography tools and demonstrate how the methods can be used to calculate their capacity.

Original languageEnglish
Title of host publication2012 IEEE International Conference on Automation Science and Engineering
Subtitle of host publicationGreen Automation Toward a Sustainable Society, CASE 2012
Pages650-655
Number of pages6
DOIs
StatePublished - 2012
Event2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012 - Seoul, Korea, Republic of
Duration: Aug 20 2012Aug 24 2012

Publication series

NameIEEE International Conference on Automation Science and Engineering
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Conference

Conference2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012
Country/TerritoryKorea, Republic of
CitySeoul
Period08/20/1208/24/12

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