TY - GEN
T1 - On the throughput of deterministic flow lines with random state dependent setups
T2 - 2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012
AU - Kim, Woo Sung
AU - Morrison, James R.
PY - 2012
Y1 - 2012
N2 - Inspired by clustered photolithography tools in semiconductor wafer manufacturing, we study flow lines with deterministic process times subject to random state dependent setups. For tractability, we assume that the setup probability is constant and independent from customer to customer; the setup duration is constant. We show that the internal state of such a flow line can be modeled as a Markov chain when customers arrive in a just-in-time (JIT) fashion. We then develop expressions for the system throughput. We apply our models to clustered photolithography tools and demonstrate how the methods can be used to calculate their capacity.
AB - Inspired by clustered photolithography tools in semiconductor wafer manufacturing, we study flow lines with deterministic process times subject to random state dependent setups. For tractability, we assume that the setup probability is constant and independent from customer to customer; the setup duration is constant. We show that the internal state of such a flow line can be modeled as a Markov chain when customers arrive in a just-in-time (JIT) fashion. We then develop expressions for the system throughput. We apply our models to clustered photolithography tools and demonstrate how the methods can be used to calculate their capacity.
UR - http://www.scopus.com/inward/record.url?scp=84872560401&partnerID=8YFLogxK
U2 - 10.1109/CoASE.2012.6386441
DO - 10.1109/CoASE.2012.6386441
M3 - Conference contribution
AN - SCOPUS:84872560401
SN - 9781467304283
T3 - IEEE International Conference on Automation Science and Engineering
SP - 650
EP - 655
BT - 2012 IEEE International Conference on Automation Science and Engineering
Y2 - 20 August 2012 through 24 August 2012
ER -