Performance models for dual-arm cluster tools

Kyungsu Park, Younghun Ahn, James R. Morrison

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations


Cluster tools with a dual-arm wafer transport robot are common in semiconductor wafer manufacturing. However, existing modeling methods suffer either from computational complexity (e.g., Petri nets, detailed simulation) and the resulting dearth of insight or from simplicity and its attendant loss of accuracy and expression (e.g., Ax+B models). Looking toward application in tool configuration optimization, performance evaluation and fab-wide simulation models, we develop expressive and computationally tractable equations and recursions for the cycle time of such cluster tools. The models include transient periods and robot behavior to express nonlinearities in tool performance. The models incorporate the affinity of such tools toward lots with certain numbers of wafers. We conduct simulations of dual-arm cluster tools to assess the quality of our models and compare performance and computational complexity between various approximation methods.

Original languageEnglish
Title of host publicationWCICA 2011 - 2011 World Congress on Intelligent Control and Automation, Conference Digest
Number of pages6
StatePublished - 2011
Event2011 World Congress on Intelligent Control and Automation, WCICA 2011 - Taipei, Taiwan, Province of China
Duration: Jun 21 2011Jun 25 2011

Publication series

NameProceedings of the World Congress on Intelligent Control and Automation (WCICA)


Conference2011 World Congress on Intelligent Control and Automation, WCICA 2011
Country/TerritoryTaiwan, Province of China


  • Cluster tools
  • cycle time
  • dual-arm robot
  • fab-wide simulation
  • nonlinearity


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