Semiconductor manufacturing intelligence and automation

Chen Fu Chien, Chia Yu Hsu, James R. Morrison, Runliang Dou

Research output: Contribution to journal › Editorial

4 Scopus citations

Original language	English
Pages (from-to)	315-317
Number of pages	3
Journal	Computers and Industrial Engineering
Volume	99
DOIs	https://doi.org/10.1016/j.cie.2016.06.020
State	Published - Sep 1 2016

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@article{92747bbb29c74b8ab99c0e7afbaf5f68,

title = "Semiconductor manufacturing intelligence and automation",

author = "Chien, {Chen Fu} and Hsu, {Chia Yu} and Morrison, {James R.} and Runliang Dou",

year = "2016",

month = sep,

day = "1",

doi = "10.1016/j.cie.2016.06.020",

language = "English",

volume = "99",

pages = "315--317",

journal = "Computers and Industrial Engineering",

issn = "0360-8352",

}

TY - JOUR

T1 - Semiconductor manufacturing intelligence and automation

AU - Chien, Chen Fu

AU - Hsu, Chia Yu

AU - Morrison, James R.

AU - Dou, Runliang

PY - 2016/9/1

Y1 - 2016/9/1

UR - http://www.scopus.com/inward/record.url?scp=84977615654&partnerID=8YFLogxK

U2 - 10.1016/j.cie.2016.06.020

DO - 10.1016/j.cie.2016.06.020

M3 - Editorial

AN - SCOPUS:84977615654

SN - 0360-8352

VL - 99

SP - 315

EP - 317

JO - Computers and Industrial Engineering

JF - Computers and Industrial Engineering

ER -