Synthesis of hafnium(IV) β-ketoiminates as potential precursors for the MOCVD of HfO2

Diego González-Flores; Siddappa A. Patil; Phillip A. Medina; Seth Dever; Chananate Uthaisar; Leslie W. Pineda; Mavis L. Montero; Joseph W. Ziller; Bradley D. Fahlman

doi:10.1016/j.ica.2012.10.002

Synthesis of hafnium(IV) β-ketoiminates as potential precursors for the MOCVD of HfO₂

Diego González-Flores, Siddappa A. Patil, Phillip A. Medina, Seth Dever, Chananate Uthaisar, Leslie W. Pineda, Mavis L. Montero, Joseph W. Ziller, Bradley D. Fahlman

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

An amine-elimination pathway has been used to produce two new hafnium compounds starting from the tetrakis(dimethylamido)hafnium(IV) complex and an amine-bis[(Z)-4-(2,6-dimethylphenylamino)pent-3-en-2-one]bis(dimethylamido) hafnium(IV) and [(Z)-4-(4-methylphenylamino)pent-3-en-2-one]bis(dimethylamido) hafnium(IV). The resulting complexes were characterized by single crystal X-ray diffraction and NMR. In addition, their volatilities were studied by thermogravimetric analysis (TGA), where [(Z)-4-(4-methylphenylamino)pent-3-en-2- one]bis(dimethylamido)hafnium(IV) showed better properties for MOCVD applications with a ΔH_sub of 27 kJ/mol and a T_sub of 104 °C.

Original language	English
Pages (from-to)	60-65
Number of pages	6
Journal	Inorganica Chimica Acta
Volume	396
DOIs	https://doi.org/10.1016/j.ica.2012.10.002
State	Published - Feb 24 2013

Keywords

Hafnium compounds
High-κ dielectric
Metal-organic chemical vapor deposition (MOCVD)
Sublimation enthalpy
Thermogravimetric analysis (TGA)
Volatility

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10.1016/j.ica.2012.10.002

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@article{1da4aadd215e4649ad66eb3a86673683,

title = "Synthesis of hafnium(IV) β-ketoiminates as potential precursors for the MOCVD of HfO2",

abstract = "An amine-elimination pathway has been used to produce two new hafnium compounds starting from the tetrakis(dimethylamido)hafnium(IV) complex and an amine-bis[(Z)-4-(2,6-dimethylphenylamino)pent-3-en-2-one]bis(dimethylamido) hafnium(IV) and [(Z)-4-(4-methylphenylamino)pent-3-en-2-one]bis(dimethylamido) hafnium(IV). The resulting complexes were characterized by single crystal X-ray diffraction and NMR. In addition, their volatilities were studied by thermogravimetric analysis (TGA), where [(Z)-4-(4-methylphenylamino)pent-3-en-2- one]bis(dimethylamido)hafnium(IV) showed better properties for MOCVD applications with a ΔHsub of 27 kJ/mol and a Tsub of 104 °C.",

keywords = "Hafnium compounds, High-κ dielectric, Metal-organic chemical vapor deposition (MOCVD), Sublimation enthalpy, Thermogravimetric analysis (TGA), Volatility",

author = "Diego Gonz{\'a}lez-Flores and Patil, {Siddappa A.} and Medina, {Phillip A.} and Seth Dever and Chananate Uthaisar and Pineda, {Leslie W.} and Montero, {Mavis L.} and Ziller, {Joseph W.} and Fahlman, {Bradley D.}",

note = "Funding Information: The authors would like to thank the National Science Foundation (CHE-0911061) for financial support. We also acknowledge the Ministerio de Ciencia y Tecnolog{\'i}a de Costa Rica (MICIT), Consejo Nacional para Investigaciones Cient{\'i}ficas y Tecnol{\'o}gicas (CONICIT), and the Centro de Electroquı{\'i}mica y Energ{\'i}a Qu{\'i}mica (CELEQ) at the Universidad of Costa Rica for providing partial financial support for an internship for Diego Gonz{\'a}lez-Flores at Central Michigan University. ",

year = "2013",

month = feb,

day = "24",

doi = "10.1016/j.ica.2012.10.002",

language = "English",

volume = "396",

pages = "60--65",

journal = "Inorganica Chimica Acta",

issn = "0020-1693",

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TY - JOUR

T1 - Synthesis of hafnium(IV) β-ketoiminates as potential precursors for the MOCVD of HfO2

AU - González-Flores, Diego

AU - Patil, Siddappa A.

AU - Medina, Phillip A.

AU - Dever, Seth

AU - Uthaisar, Chananate

AU - Pineda, Leslie W.

AU - Montero, Mavis L.

AU - Ziller, Joseph W.

AU - Fahlman, Bradley D.

N1 - Funding Information: The authors would like to thank the National Science Foundation (CHE-0911061) for financial support. We also acknowledge the Ministerio de Ciencia y Tecnología de Costa Rica (MICIT), Consejo Nacional para Investigaciones Científicas y Tecnológicas (CONICIT), and the Centro de Electroquıímica y Energía Química (CELEQ) at the Universidad of Costa Rica for providing partial financial support for an internship for Diego González-Flores at Central Michigan University.

PY - 2013/2/24

Y1 - 2013/2/24

N2 - An amine-elimination pathway has been used to produce two new hafnium compounds starting from the tetrakis(dimethylamido)hafnium(IV) complex and an amine-bis[(Z)-4-(2,6-dimethylphenylamino)pent-3-en-2-one]bis(dimethylamido) hafnium(IV) and [(Z)-4-(4-methylphenylamino)pent-3-en-2-one]bis(dimethylamido) hafnium(IV). The resulting complexes were characterized by single crystal X-ray diffraction and NMR. In addition, their volatilities were studied by thermogravimetric analysis (TGA), where [(Z)-4-(4-methylphenylamino)pent-3-en-2- one]bis(dimethylamido)hafnium(IV) showed better properties for MOCVD applications with a ΔHsub of 27 kJ/mol and a Tsub of 104 °C.

AB - An amine-elimination pathway has been used to produce two new hafnium compounds starting from the tetrakis(dimethylamido)hafnium(IV) complex and an amine-bis[(Z)-4-(2,6-dimethylphenylamino)pent-3-en-2-one]bis(dimethylamido) hafnium(IV) and [(Z)-4-(4-methylphenylamino)pent-3-en-2-one]bis(dimethylamido) hafnium(IV). The resulting complexes were characterized by single crystal X-ray diffraction and NMR. In addition, their volatilities were studied by thermogravimetric analysis (TGA), where [(Z)-4-(4-methylphenylamino)pent-3-en-2- one]bis(dimethylamido)hafnium(IV) showed better properties for MOCVD applications with a ΔHsub of 27 kJ/mol and a Tsub of 104 °C.

KW - Hafnium compounds

KW - High-κ dielectric

KW - Metal-organic chemical vapor deposition (MOCVD)

KW - Sublimation enthalpy

KW - Thermogravimetric analysis (TGA)

KW - Volatility

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U2 - 10.1016/j.ica.2012.10.002

DO - 10.1016/j.ica.2012.10.002

M3 - Article

AN - SCOPUS:84875244529

SN - 0020-1693

VL - 396

SP - 60

EP - 65

JO - Inorganica Chimica Acta

JF - Inorganica Chimica Acta

ER -

Synthesis of hafnium(IV) β-ketoiminates as potential precursors for the MOCVD of HfO₂

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Keywords

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