Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints

Engineering

• Algorithm 16%
• Computational Complexity 16%
• Constraints 33%
• Demonstrates 16%
• General Problem 16%
• Models 33%
• Modules 16%
• Multistage 16%
• Optimal Solution 16%
• Process Chamber 16%
• Robot 100%
• Semiconductor Manufacturing 16%
• Throughput 16%
• Transients 50%
• Wafer Quality 33%

Computer Science

• Armed 16%
• Branch-and-Bound Algorithm 33%
• Optimal Solution 16%
• Scheduling 16%
• Simulation Mode 33%
• Simulation Study 16%
• System Analysis 33%
• Throughput 16%